Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces

Krishnamoorthy, Sivashankar; Van den Boogaart, Marc Antonius Friedrich; Brugger, Juergen; Hibert, Cyrille; Pugin, Raphael; Hinderling, Christian; Heinzelmann, Harry

doi:10.1002/adma.200702478

Publication type:	Article in scientific journal
Type of review:	Peer review (publication)
Title:	Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces
Authors:	Krishnamoorthy, Sivashankar Van den Boogaart, Marc Antonius Friedrich Brugger, Juergen Hibert, Cyrille Pugin, Raphael Hinderling, Christian Heinzelmann, Harry
DOI:	10.1002/adma.200702478
Published in:	Advanced Materials
Volume(Issue):	20
Issue:	18
Page(s):	3533
Pages to:	3538
Issue Date:	2008
Publisher / Ed. Institution:	Wiley
ISSN:	0935-9648 1521-4095
Language:	English
Subject (DDC):	620.11: Engineering materials
Abstract:	A novel and flexible top‐down/bottom‐up scheme to achieve (sub‐)micrometer scale patterning of nanostructures with complementary micro‐/nanoarchitectures is presented. Nanostencils (perforated free‐standing Si3N4 membranes) are employed to pattern silicon nanopillars derived from the use of self‐assembled copolymer micelles as dry etch masks.
URI:	https://digitalcollection.zhaw.ch/handle/11475/13664
Fulltext version:	Published version
License (according to publishing contract):	Licence according to publishing contract
Departement:	Life Sciences and Facility Management
Organisational Unit:	Institute of Chemistry and Biotechnology (ICBT)
Appears in collections:	Publikationen Life Sciences und Facility Management

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Krishnamoorthy, S., Van den Boogaart, M. A. F., Brugger, J., Hibert, C., Pugin, R., Hinderling, C., & Heinzelmann, H. (2008). Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials, 20(18), 3533–3538. https://doi.org/10.1002/adma.200702478

Krishnamoorthy, S. et al. (2008) ‘Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces’, Advanced Materials, 20(18), pp. 3533–3538. Available at: https://doi.org/10.1002/adma.200702478.

S. Krishnamoorthy et al., “Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces,” Advanced Materials, vol. 20, no. 18, pp. 3533–3538, 2008, doi: 10.1002/adma.200702478.

KRISHNAMOORTHY, Sivashankar, Marc Antonius Friedrich VAN DEN BOOGAART, Juergen BRUGGER, Cyrille HIBERT, Raphael PUGIN, Christian HINDERLING und Harry HEINZELMANN, 2008. Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials. 2008. Bd. 20, Nr. 18, S. 3533–3538. DOI 10.1002/adma.200702478

Krishnamoorthy, Sivashankar, Marc Antonius Friedrich Van den Boogaart, Juergen Brugger, Cyrille Hibert, Raphael Pugin, Christian Hinderling, and Harry Heinzelmann. 2008. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials 20 (18): 3533–38. https://doi.org/10.1002/adma.200702478.

Krishnamoorthy, Sivashankar, et al. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials, vol. 20, no. 18, 2008, pp. 3533–38, https://doi.org/10.1002/adma.200702478.