Title: Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces
Authors : Krishnamoorthy, Sivashankar
Van den Boogaart, Marc Antonius Friedrich
Brugger, Juergen
Hibert, Cyrille
Pugin, Raphael
Hinderling, Christian
Heinzelmann, Harry
Published in : Advanced Materials
Volume(Issue) : 20
Issue : 18
Pages : 3533
Pages to: 3538
Publisher / Ed. Institution : Wiley
Issue Date: 2008
License (according to publishing contract) : Licence according to publishing contract
Type of review: Peer review (Publication)
Language : English
Subject (DDC) : 620.11: Engineering materials
Abstract: A novel and flexible top‐down/bottom‐up scheme to achieve (sub‐)micrometer scale patterning of nanostructures with complementary micro‐/nanoarchitectures is presented. Nanostencils (perforated free‐standing Si3N4 membranes) are employed to pattern silicon nanopillars derived from the use of self‐assembled copolymer micelles as dry etch masks.
Departement: Life Sciences und Facility Management
Organisational Unit: Institute of Chemistry and Biotechnology (ICBT)
Publication type: Article in scientific Journal
DOI : 10.1002/adma.200702478
ISSN: 0935-9648
1521-4095
URI: https://digitalcollection.zhaw.ch/handle/11475/13664
Appears in Collections:Publikationen Life Sciences und Facility Management

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