| Publication type: | Article in scientific journal |
| Type of review: | Peer review (publication) |
| Title: | CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure |
| Authors: | Schöning, M.J. Brinkmann, D. Rolka, D. Demuth, Caspar Poghossian, A. |
| DOI: | 10.1016/j.snb.2005.03.053 |
| Published in: | Sensors and Actuators B: Chemical |
| Volume(Issue): | 111-112 |
| Pages: | 423 |
| Pages to: | 429 |
| Issue Date: | 2005 |
| Publisher / Ed. Institution: | Elsevier |
| ISSN: | 0925-4005 |
| Language: | English |
| Subject (DDC): | 540: Chemistry |
| Abstract: | “Non-glass” pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films. |
| URI: | https://digitalcollection.zhaw.ch/handle/11475/9584 |
| Fulltext version: | Published version |
| License (according to publishing contract): | Licence according to publishing contract |
| Departement: | Life Sciences and Facility Management |
| Organisational Unit: | Institute of Chemistry and Biotechnology (ICBT) |
| Appears in collections: | Publikationen Life Sciences und Facility Management |
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