|Publication type:||Article in scientific journal|
|Type of review:||Peer review (publication)|
|Title:||CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure|
|Published in:||Sensors and Actuators B: Chemical|
|Publisher / Ed. Institution:||Elsevier|
|Subject (DDC):||540: Chemistry|
|Abstract:||“Non-glass” pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.|
|Fulltext version:||Published version|
|License (according to publishing contract):||Licence according to publishing contract|
|Departement:||Life Sciences and Facility Management|
|Organisational Unit:||Institute of Chemistry and Biotechnology (ICBT)|
|Appears in collections:||Publikationen Life Sciences und Facility Management|
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