Title: Auf zehn Nanometer genau
Authors : Zesch, Wolfgang
Büchi, Roland
Codourey, Alain
Published in : Technische Rundschau : Transfer
Issue : 29/30
Pages : 20
Pages to: 21
Publisher / Ed. Institution : Hallwag
Publisher / Ed. Institution: Bern
Issue Date: 1995
License (according to publishing contract) : Licence according to publishing contract
Language : German
Subject (DDC) : 620: Engineering
Departement: School of Engineering
Organisational Unit: Institute of Mechatronic Systems (IMS)
Publication type: Contribution to Magazine or Newspaper
ISSN: 0040-148X
1023-0823
URI: https://digitalcollection.zhaw.ch/handle/11475/3817
Appears in Collections:Publikationen School of Engineering

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