Title: Auf zehn Nanometer genau
Authors : Zesch, Wolfgang
Büchi, Roland
Codourey, Alain
Published in : Technische Rundschau : Transfer
Issue : 29/30
Pages : 20
Pages to: 21
Publisher / Ed. Institution : Hallwag
Publisher / Ed. Institution: Bern
Issue Date: 1995
Language : Deutsch / German
Subject (DDC) : 620: Ingenieurwesen
Departement: School of Engineering
Organisational Unit: Institut für Mechatronische Systeme (IMS)
Publication type: Beitrag in Magazin oder Zeitung / Contribution to Magazine or Newspaper
ISSN: 0040-148X
URI: https://digitalcollection.zhaw.ch/handle/11475/3817
License (according to publishing contract) : Lizenz gemäss Verlagsvertrag / Licence according to publishing contract
Appears in Collections:Publikationen School of Engineering

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