Laser micromachining of high-density optical structures on large substrates

Böhlen, Karl L.; Stassen Böhlen, Ines B.

doi:10.1117/12.537827

Publication type:	Conference paper
Type of review:	Not specified
Title:	Laser micromachining of high-density optical structures on large substrates
Authors:	Böhlen, Karl L. Stassen Böhlen, Ines B.
DOI:	10.1117/12.537827
Published in:	Proceedings / SPIE
Proceedings:	Photon Processing in Microelectronics and Photonics III
Volume(Issue):	5339
Page(s):	118
Pages to:	127
Conference details:	Lasers and Applications in Science and Engineering, San Jose, USA, 25-29 January 2004
Issue Date:	2004
Publisher / Ed. Institution:	International society for optical engineering
ISSN:	0277-786X
Language:	English
Subjects:	Laser processing; Micro-optics; Large area machining; 3D structure
Subject (DDC):	621.3: Electrical, communications, control engineering
Abstract:	A new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS is a laser micro-machining technique where the information for the ablation of a specific 3D feature is stored as a linear array on a chrome-on-quartz mask. The feature is then written by synchronised motion and laser firing, such that the firing frequency of the laser corresponds to the spatial pitch of the features. This requires highly accurate laser triggering with low-jitter signals, and accurate stages with high resolution encoders. An add-in for CAD software has been developed to generate the mask pattern efficiently and error-free, using the 3D designs. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. Feature sizes down to a few microns can be produced with excellent surface quality. Large areas of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels for electroforming to produce moulds for replication of display enhancement films.
URI:	https://digitalcollection.zhaw.ch/handle/11475/16451
Fulltext version:	Published version
License (according to publishing contract):	Licence according to publishing contract
Departement:	School of Engineering
Organisational Unit:	Institute of Applied Mathematics and Physics (IAMP)
Appears in collections:	Publikationen School of Engineering

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Böhlen, K. L., & Stassen Böhlen, I. B. (2004). Laser micromachining of high-density optical structures on large substrates [Conference paper]. Proceedings / SPIE, 5339, 118–127. https://doi.org/10.1117/12.537827

Böhlen, K.L. and Stassen Böhlen, I.B. (2004) ‘Laser micromachining of high-density optical structures on large substrates’, in Proceedings / SPIE. International society for optical engineering, pp. 118–127. Available at: https://doi.org/10.1117/12.537827.

K. L. Böhlen and I. B. Stassen Böhlen, “Laser micromachining of high-density optical structures on large substrates,” in Proceedings / SPIE, 2004, vol. 5339, pp. 118–127. doi: 10.1117/12.537827.

BÖHLEN, Karl L. und Ines B. STASSEN BÖHLEN, 2004. Laser micromachining of high-density optical structures on large substrates. In: Proceedings / SPIE. Conference paper. International society for optical engineering. 2004. S. 118–127

Böhlen, Karl L., and Ines B. Stassen Böhlen. 2004. “Laser Micromachining of High-Density Optical Structures on Large Substrates.” Conference paper. In Proceedings / SPIE, 5339:118–27. International society for optical engineering. https://doi.org/10.1117/12.537827.

Böhlen, Karl L., and Ines B. Stassen Böhlen. “Laser Micromachining of High-Density Optical Structures on Large Substrates.” Proceedings / SPIE, vol. 5339, International society for optical engineering, 2004, pp. 118–27, https://doi.org/10.1117/12.537827.