Title: Laser micromachining of high-density optical structures on large substrates
Authors : Böhlen, Karl L.
Stassen Böhlen, Ines B.
Published in : Proceedings / SPIE
Proceedings: Photon Processing in Microelectronics and Photonics III
Volume(Issue) : 5339
Pages : 118
Pages to: 127
Conference details: Lasers and Applications in Science and Engineering, San Jose, United States, 25-29 January 2004
Publisher / Ed. Institution : International society for optical engineering
Issue Date: 2004
License (according to publishing contract) : Licence according to publishing contract
Type of review: Not specified
Language : English
Subjects : Laser processing; Micro-optics; Large area machining; 3D structure
Subject (DDC) : 621.3: Electrical engineering and electronics
Abstract: A new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS is a laser micro-machining technique where the information for the ablation of a specific 3D feature is stored as a linear array on a chrome-on-quartz mask. The feature is then written by synchronised motion and laser firing, such that the firing frequency of the laser corresponds to the spatial pitch of the features. This requires highly accurate laser triggering with low-jitter signals, and accurate stages with high resolution encoders. An add-in for CAD software has been developed to generate the mask pattern efficiently and error-free, using the 3D designs. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. Feature sizes down to a few microns can be produced with excellent surface quality. Large areas of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels for electroforming to produce moulds for replication of display enhancement films.
Departement: School of Engineering
Organisational Unit: Institute of Applied Mathematics and Physics (IAMP)
Publication type: Conference paper
DOI : 10.1117/12.537827
ISSN: 0277-786X
URI: https://digitalcollection.zhaw.ch/handle/11475/16451
Appears in Collections:Publikationen School of Engineering

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