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dc.contributor.authorBüchi, Roland-
dc.contributor.authorZesch, Wolfgang-
dc.contributor.authorCodourey, Alain-
dc.date.accessioned2018-03-14T13:55:59Z-
dc.date.available2018-03-14T13:55:59Z-
dc.date.issued1995-
dc.identifier.issn0277-786Xde_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/3821-
dc.description.abstractThe need for high precision robots dedicated to the assembly of microsystems has led to the design of new kinds of actuators able to reach very high positional accuracy over large distances. Among these, inertial sliders have received considerable interest in the last years. They have the advantage of being based on a simple principle that leads to a simple mechanical design. However, because they are based on the nonlinearity of friction, it is not easy to predict their stepsize repeatability. In order to understand the most important parameters affecting the precision of inertial drives, a theoretical study of a 1 degree of freedom inertial slider has been established. Analytical formulas describing the influence of different parameters, such as static and dynamic friction and mass distribution, have been developed. The effect of applied functions (sawtooth and parabolic), have also been studied. The theoretical cut off frequency has been found for each of the different waveforms, allowing us to predict the maximal and minimal working frequencies of the system. Thus, for each curve form, the repeatability of inertial sliders can be evaluated taking into account the uncertainties in the friction coefficients. The best suited waveforms for given constraints can therefore be selected. Simulations carried out from this have been successfully compared to experimental results.de_CH
dc.language.isoende_CH
dc.publisherSPIEde_CH
dc.relation.ispartofProceedings of SPIEde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subjectPiezoelementde_CH
dc.subjectInertial sliderde_CH
dc.subjectMechanicsde_CH
dc.subjectActuatorde_CH
dc.subject.ddc620: Ingenieurwesende_CH
dc.titleInertial drives for micro- and nanorobots : analytical studyde_CH
dc.typeKonferenz: Paperde_CH
dcterms.typeTextde_CH
zhaw.departementSchool of Engineeringde_CH
zhaw.organisationalunitInstitut für Mechatronische Systeme (IMS)de_CH
zhaw.publisher.placeBellinghamde_CH
dc.identifier.doi10.1117/12.228639de_CH
zhaw.conference.detailsSPIE Photonics East '95 : Microrobotics and Micromachanical Systems Symposium, Philadelphia PA, USA, 1995de_CH
zhaw.funding.euNode_CH
zhaw.originated.zhawNode_CH
zhaw.parentwork.editorParker, Lynne E.-
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume2593de_CH
zhaw.publication.reviewPeer review (Abstract)de_CH
zhaw.title.proceedingsProceedings of SPIE Photonics East '95 : Microrobotics and Micromachanical Systems Symposium, Philadelphia (PA), 1995de_CH
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Büchi, R., Zesch, W., & Codourey, A. (1995). Inertial drives for micro- and nanorobots : analytical study [Conference paper]. In L. E. Parker (Ed.), Proceedings of SPIE (Vol. 2593). SPIE. https://doi.org/10.1117/12.228639
Büchi, R., Zesch, W. and Codourey, A. (1995) ‘Inertial drives for micro- and nanorobots : analytical study’, in L.E. Parker (ed.) Proceedings of SPIE. Bellingham: SPIE. Available at: https://doi.org/10.1117/12.228639.
R. Büchi, W. Zesch, and A. Codourey, “Inertial drives for micro- and nanorobots : analytical study,” in Proceedings of SPIE, 1995, vol. 2593. doi: 10.1117/12.228639.
BÜCHI, Roland, Wolfgang ZESCH und Alain CODOUREY, 1995. Inertial drives for micro- and nanorobots : analytical study. In: Lynne E. PARKER (Hrsg.), Proceedings of SPIE. Conference paper. Bellingham: SPIE. 1995
Büchi, Roland, Wolfgang Zesch, and Alain Codourey. 1995. “Inertial Drives for Micro- and Nanorobots : Analytical Study.” Conference paper. In Proceedings of SPIE, edited by Lynne E. Parker. Vol. 2593. Bellingham: SPIE. https://doi.org/10.1117/12.228639.
Büchi, Roland, et al. “Inertial Drives for Micro- and Nanorobots : Analytical Study.” Proceedings of SPIE, edited by Lynne E. Parker, vol. 2593, SPIE, 1995, https://doi.org/10.1117/12.228639.


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