Publication type: Conference paper
Type of review: Peer review (abstract)
Title: Inertial drives for micro- and nanorobots : analytical study
Authors: Büchi, Roland
Zesch, Wolfgang
Codourey, Alain
DOI: 10.1117/12.228639
Published in: Proceedings of SPIE
Proceedings: Proceedings of SPIE Photonics East '95 : Microrobotics and Micromachanical Systems Symposium, Philadelphia (PA), 1995
Editors of the parent work: Parker, Lynne E.
Volume(Issue): 2593
Conference details: SPIE Photonics East '95 : Microrobotics and Micromachanical Systems Symposium, Philadelphia PA, USA, 1995
Issue Date: 1995
Publisher / Ed. Institution: SPIE
Publisher / Ed. Institution: Bellingham
ISSN: 0277-786X
Language: English
Subjects: Piezoelement; Inertial slider; Mechanics; Actuator
Subject (DDC): 620: Engineering
Abstract: The need for high precision robots dedicated to the assembly of microsystems has led to the design of new kinds of actuators able to reach very high positional accuracy over large distances. Among these, inertial sliders have received considerable interest in the last years. They have the advantage of being based on a simple principle that leads to a simple mechanical design. However, because they are based on the nonlinearity of friction, it is not easy to predict their stepsize repeatability. In order to understand the most important parameters affecting the precision of inertial drives, a theoretical study of a 1 degree of freedom inertial slider has been established. Analytical formulas describing the influence of different parameters, such as static and dynamic friction and mass distribution, have been developed. The effect of applied functions (sawtooth and parabolic), have also been studied. The theoretical cut off frequency has been found for each of the different waveforms, allowing us to predict the maximal and minimal working frequencies of the system. Thus, for each curve form, the repeatability of inertial sliders can be evaluated taking into account the uncertainties in the friction coefficients. The best suited waveforms for given constraints can therefore be selected. Simulations carried out from this have been successfully compared to experimental results.
Fulltext version: Published version
License (according to publishing contract): Licence according to publishing contract
Departement: School of Engineering
Organisational Unit: Institute of Mechatronic Systems (IMS)
Appears in Collections:Publikationen School of Engineering

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