Please use this identifier to cite or link to this item: https://doi.org/10.21256/zhaw-2210
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dc.contributor.authorCantoni, Marco-
dc.contributor.authorHolzer, Lorenz-
dc.date.accessioned2018-01-25T12:39:41Z-
dc.date.available2018-01-25T12:39:41Z-
dc.date.issued2014-04-
dc.identifier.issn0883-7694de_CH
dc.identifier.issn1938-1425de_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/2210-
dc.descriptionErworben im Rahmen der Schweizer Nationallizenzen (http://www.nationallizenzen.ch)de_CH
dc.description.abstractThis article summarizes recent technological improvements of focused ion beam tomography. New in-lens (in-column) detectors have a higher sensitivity for low energy electrons. In combination with energy filtering, this leads to better results for phase segmentation and quantitative analysis. The quality of the 3D reconstructions is also improved with a refined drift correction procedure. In addition, the new scanning strategies can increase the acquisition speed significantly. Furthermore, fast spectral and elemental mappings with silicon drift detectors open up new possibilities in chemical analysis. Examples of a porous superconductor and a solder with various precipitates are presented, which illustrate that combined analysis of two simultaneous detector signals (secondary and backscattered electrons) provides reliable segmentation results even for very complex 3D microstructures. In addition, high throughput elemental analysis is illustrated for a multi-phase Ni-Ti stainless steel. Overall, the improvements in resolution, contrast, stability, and throughput open new possibilities for 3D analysis of nanostructured materials.de_CH
dc.language.isoende_CH
dc.publisherCambridge University Pressde_CH
dc.relation.ispartofMRS Bulletinde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subjectMapde_CH
dc.subject.ddc620.11: Werkstoffede_CH
dc.titleAdvances in 3D focused ion beam tomographyde_CH
dc.typeBeitrag in wissenschaftlicher Zeitschriftde_CH
dcterms.typeTextde_CH
zhaw.departementSchool of Engineeringde_CH
zhaw.organisationalunitInstitute of Computational Physics (ICP)de_CH
dc.identifier.doi10.1557/mrs.2014.54de_CH
dc.identifier.doi10.21256/zhaw-2210-
zhaw.funding.euNode_CH
zhaw.issue4de_CH
zhaw.originated.zhawYesde_CH
zhaw.pages.end360de_CH
zhaw.pages.start354de_CH
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume39de_CH
zhaw.publication.reviewPeer review (Publikation)de_CH
Appears in collections:Publikationen School of Engineering

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Cantoni, M., & Holzer, L. (2014). Advances in 3D focused ion beam tomography. MRS Bulletin, 39(4), 354–360. https://doi.org/10.1557/mrs.2014.54
Cantoni, M. and Holzer, L. (2014) ‘Advances in 3D focused ion beam tomography’, MRS Bulletin, 39(4), pp. 354–360. Available at: https://doi.org/10.1557/mrs.2014.54.
M. Cantoni and L. Holzer, “Advances in 3D focused ion beam tomography,” MRS Bulletin, vol. 39, no. 4, pp. 354–360, Apr. 2014, doi: 10.1557/mrs.2014.54.
CANTONI, Marco und Lorenz HOLZER, 2014. Advances in 3D focused ion beam tomography. MRS Bulletin. April 2014. Bd. 39, Nr. 4, S. 354–360. DOI 10.1557/mrs.2014.54
Cantoni, Marco, and Lorenz Holzer. 2014. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin 39 (4): 354–60. https://doi.org/10.1557/mrs.2014.54.
Cantoni, Marco, and Lorenz Holzer. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin, vol. 39, no. 4, Apr. 2014, pp. 354–60, https://doi.org/10.1557/mrs.2014.54.


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