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https://doi.org/10.21256/zhaw-2210| Publikationstyp: | Beitrag in wissenschaftlicher Zeitschrift |
| Art der Begutachtung: | Peer review (Publikation) |
| Titel: | Advances in 3D focused ion beam tomography |
| Autor/-in: | Cantoni, Marco Holzer, Lorenz |
| DOI: | 10.1557/mrs.2014.54 10.21256/zhaw-2210 |
| Erschienen in: | MRS Bulletin |
| Band(Heft): | 39 |
| Heft: | 4 |
| Seite(n): | 354 |
| Seiten bis: | 360 |
| Erscheinungsdatum: | Apr-2014 |
| Verlag / Hrsg. Institution: | Cambridge University Press |
| ISSN: | 0883-7694 1938-1425 |
| Sprache: | Englisch |
| Schlagwörter: | Map |
| Fachgebiet (DDC): | 620.11: Werkstoffe |
| Zusammenfassung: | This article summarizes recent technological improvements of focused ion beam tomography. New in-lens (in-column) detectors have a higher sensitivity for low energy electrons. In combination with energy filtering, this leads to better results for phase segmentation and quantitative analysis. The quality of the 3D reconstructions is also improved with a refined drift correction procedure. In addition, the new scanning strategies can increase the acquisition speed significantly. Furthermore, fast spectral and elemental mappings with silicon drift detectors open up new possibilities in chemical analysis. Examples of a porous superconductor and a solder with various precipitates are presented, which illustrate that combined analysis of two simultaneous detector signals (secondary and backscattered electrons) provides reliable segmentation results even for very complex 3D microstructures. In addition, high throughput elemental analysis is illustrated for a multi-phase Ni-Ti stainless steel. Overall, the improvements in resolution, contrast, stability, and throughput open new possibilities for 3D analysis of nanostructured materials. |
| Weitere Angaben: | Erworben im Rahmen der Schweizer Nationallizenzen (http://www.nationallizenzen.ch) |
| URI: | https://digitalcollection.zhaw.ch/handle/11475/2210 |
| Volltext Version: | Publizierte Version |
| Lizenz (gemäss Verlagsvertrag): | Lizenz gemäss Verlagsvertrag |
| Departement: | School of Engineering |
| Organisationseinheit: | Institute of Computational Physics (ICP) |
| Enthalten in den Sammlungen: | Publikationen School of Engineering |
Dateien zu dieser Ressource:
| Datei | Beschreibung | Größe | Format | |
|---|---|---|---|---|
| 2014_Cantoni-Holzer_Advances-in-3D-focused-ion-beam-tomography.pdf | 824.28 kB | Adobe PDF |  Öffnen/Anzeigen |
Zur Langanzeige
Cantoni, M., & Holzer, L. (2014). Advances in 3D focused ion beam tomography. MRS Bulletin, 39(4), 354–360. https://doi.org/10.1557/mrs.2014.54
Cantoni, M. and Holzer, L. (2014) ‘Advances in 3D focused ion beam tomography’, MRS Bulletin, 39(4), pp. 354–360. Available at: https://doi.org/10.1557/mrs.2014.54.
M. Cantoni and L. Holzer, “Advances in 3D focused ion beam tomography,” MRS Bulletin, vol. 39, no. 4, pp. 354–360, Apr. 2014, doi: 10.1557/mrs.2014.54.
CANTONI, Marco und Lorenz HOLZER, 2014. Advances in 3D focused ion beam tomography. MRS Bulletin. April 2014. Bd. 39, Nr. 4, S. 354–360. DOI 10.1557/mrs.2014.54
Cantoni, Marco, and Lorenz Holzer. 2014. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin 39 (4): 354–60. https://doi.org/10.1557/mrs.2014.54.
Cantoni, Marco, and Lorenz Holzer. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin, vol. 39, no. 4, Apr. 2014, pp. 354–60, https://doi.org/10.1557/mrs.2014.54.
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