Please use this identifier to cite or link to this item:
https://doi.org/10.21256/zhaw-2210| Publication type: | Article in scientific journal |
| Type of review: | Peer review (publication) |
| Title: | Advances in 3D focused ion beam tomography |
| Authors: | Cantoni, Marco Holzer, Lorenz |
| DOI: | 10.1557/mrs.2014.54 10.21256/zhaw-2210 |
| Published in: | MRS Bulletin |
| Volume(Issue): | 39 |
| Issue: | 4 |
| Page(s): | 354 |
| Pages to: | 360 |
| Issue Date: | Apr-2014 |
| Publisher / Ed. Institution: | Cambridge University Press |
| ISSN: | 0883-7694 1938-1425 |
| Language: | English |
| Subjects: | Map |
| Subject (DDC): | 620.11: Engineering materials |
| Abstract: | This article summarizes recent technological improvements of focused ion beam tomography. New in-lens (in-column) detectors have a higher sensitivity for low energy electrons. In combination with energy filtering, this leads to better results for phase segmentation and quantitative analysis. The quality of the 3D reconstructions is also improved with a refined drift correction procedure. In addition, the new scanning strategies can increase the acquisition speed significantly. Furthermore, fast spectral and elemental mappings with silicon drift detectors open up new possibilities in chemical analysis. Examples of a porous superconductor and a solder with various precipitates are presented, which illustrate that combined analysis of two simultaneous detector signals (secondary and backscattered electrons) provides reliable segmentation results even for very complex 3D microstructures. In addition, high throughput elemental analysis is illustrated for a multi-phase Ni-Ti stainless steel. Overall, the improvements in resolution, contrast, stability, and throughput open new possibilities for 3D analysis of nanostructured materials. |
| Further description: | Erworben im Rahmen der Schweizer Nationallizenzen (http://www.nationallizenzen.ch) |
| URI: | https://digitalcollection.zhaw.ch/handle/11475/2210 |
| Fulltext version: | Published version |
| License (according to publishing contract): | Licence according to publishing contract |
| Departement: | School of Engineering |
| Organisational Unit: | Institute of Computational Physics (ICP) |
| Appears in collections: | Publikationen School of Engineering |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 2014_Cantoni-Holzer_Advances-in-3D-focused-ion-beam-tomography.pdf | 824.28 kB | Adobe PDF |  View/Open |
Show full item record
Cantoni, M., & Holzer, L. (2014). Advances in 3D focused ion beam tomography. MRS Bulletin, 39(4), 354–360. https://doi.org/10.1557/mrs.2014.54
Cantoni, M. and Holzer, L. (2014) ‘Advances in 3D focused ion beam tomography’, MRS Bulletin, 39(4), pp. 354–360. Available at: https://doi.org/10.1557/mrs.2014.54.
M. Cantoni and L. Holzer, “Advances in 3D focused ion beam tomography,” MRS Bulletin, vol. 39, no. 4, pp. 354–360, Apr. 2014, doi: 10.1557/mrs.2014.54.
CANTONI, Marco und Lorenz HOLZER, 2014. Advances in 3D focused ion beam tomography. MRS Bulletin. April 2014. Bd. 39, Nr. 4, S. 354–360. DOI 10.1557/mrs.2014.54
Cantoni, Marco, and Lorenz Holzer. 2014. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin 39 (4): 354–60. https://doi.org/10.1557/mrs.2014.54.
Cantoni, Marco, and Lorenz Holzer. “Advances in 3D Focused Ion Beam Tomography.” MRS Bulletin, vol. 39, no. 4, Apr. 2014, pp. 354–60, https://doi.org/10.1557/mrs.2014.54.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.