Title: Review of FIB tomography
Authors : Holzer, Lorenz
Cantoni, Marco
Published in : Nanofabrication using focused ion and electron beams : principles and applications
Pages : 410
Pages to: 435
Editors of the parent work: Utke, Ivo
Moshkalev, Stanislav
Russel, Philip E.
Publisher / Ed. Institution : Oxford University Press
Publisher / Ed. Institution: New York
Issue Date: 2012
License (according to publishing contract) : Licence according to publishing contract
Series : Oxford series in nanomanufacturing
Type of review: Not specified
Language : English
Subjects : Map
Subject (DDC) : 620.11: Engineering materials
Departement: School of Engineering
Organisational Unit: Institute of Computational Physics (ICP)
Publication type: Book Part
ISBN: 978-0-19-973421-4
URI: https://digitalcollection.zhaw.ch/handle/11475/2203
Appears in Collections:Publikationen School of Engineering

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