Title: New techniques for laser micromachining MEMS devices
Authors : Abbott, Charles
Allott, Ric M.
Bann, Bob
Boehlen, Karl L.
Gower, Malcolm C.
Rumsby, Phil T.
Stassen Böhlen, Ines
Sykes, Neil
Published in : Proceedings / SPIE
Proceedings: High-Power Laser Ablation IV
Volume(Issue) : 4760
Pages : 281
Pages to: 289
Conference details: International Symposium on High-Power Laser Ablation 2002, Taos, United States, 21-26 April 2002
Publisher / Ed. Institution : International society for optical engineering
Issue Date: 2002
License (according to publishing contract) : Licence according to publishing contract
Type of review: Not specified
Language : English
Subjects : Laser micromachining; Inkjet printer nozzle; Plasma display panel
Subject (DDC) : 621.3: Electrical engineering and electronics
Abstract: Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.
Departement: School of Engineering
Organisational Unit: Institute of Applied Mathematics and Physics (IAMP)
Publication type: Conference paper
DOI : 10.1117/12.482096
ISSN: 0277-786X
URI: https://digitalcollection.zhaw.ch/handle/11475/16448
Appears in Collections:Publikationen School of Engineering

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