New techniques for laser micromachining MEMS devices

Abbott, Charles; Allott, Ric M.; Bann, Bob; Boehlen, Karl L.; Gower, Malcolm C.; Rumsby, Phil T.; Stassen Böhlen, Ines; Sykes, Neil

doi:10.1117/12.482096

Publication type:	Conference paper
Type of review:	Not specified
Title:	New techniques for laser micromachining MEMS devices
Authors:	Abbott, Charles Allott, Ric M. Bann, Bob Boehlen, Karl L. Gower, Malcolm C. Rumsby, Phil T. Stassen Böhlen, Ines Sykes, Neil
DOI:	10.1117/12.482096
Published in:	Proceedings / SPIE
Proceedings:	High-Power Laser Ablation IV
Volume(Issue):	4760
Page(s):	281
Pages to:	289
Conference details:	International Symposium on High-Power Laser Ablation 2002, Taos, USA, 21-26 April 2002
Issue Date:	2002
Publisher / Ed. Institution:	International society for optical engineering
ISSN:	0277-786X
Language:	English
Subjects:	Laser micromachining; Inkjet printer nozzle; Plasma display panel
Subject (DDC):	621.3: Electrical, communications, control engineering
Abstract:	Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.
URI:	https://digitalcollection.zhaw.ch/handle/11475/16448
Fulltext version:	Published version
License (according to publishing contract):	Licence according to publishing contract
Departement:	School of Engineering
Organisational Unit:	Institute of Applied Mathematics and Physics (IAMP)
Appears in collections:	Publikationen School of Engineering

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Abbott, C., Allott, R. M., Bann, B., Boehlen, K. L., Gower, M. C., Rumsby, P. T., Stassen Böhlen, I., & Sykes, N. (2002). New techniques for laser micromachining MEMS devices [Conference paper]. Proceedings / SPIE, 4760, 281–289. https://doi.org/10.1117/12.482096

Abbott, C. et al. (2002) ‘New techniques for laser micromachining MEMS devices’, in Proceedings / SPIE. International society for optical engineering, pp. 281–289. Available at: https://doi.org/10.1117/12.482096.

C. Abbott et al., “New techniques for laser micromachining MEMS devices,” in Proceedings / SPIE, 2002, vol. 4760, pp. 281–289. doi: 10.1117/12.482096.

ABBOTT, Charles, Ric M. ALLOTT, Bob BANN, Karl L. BOEHLEN, Malcolm C. GOWER, Phil T. RUMSBY, Ines STASSEN BÖHLEN und Neil SYKES, 2002. New techniques for laser micromachining MEMS devices. In: Proceedings / SPIE. Conference paper. International society for optical engineering. 2002. S. 281–289

Abbott, Charles, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Böhlen, and Neil Sykes. 2002. “New Techniques for Laser Micromachining MEMS Devices.” Conference paper. In Proceedings / SPIE, 4760:281–89. International society for optical engineering. https://doi.org/10.1117/12.482096.

Abbott, Charles, et al. “New Techniques for Laser Micromachining MEMS Devices.” Proceedings / SPIE, vol. 4760, International society for optical engineering, 2002, pp. 281–89, https://doi.org/10.1117/12.482096.