Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition

Evans, Anna; Prestat, Michel; Tölke, R.; Schlupp, M. V. F.; Gauckler, L. J.; Safa, Yasser; Hocker, Thomas; Courbat, J.; Briand, D.; de Rooij, N. F.; Courty, D.

doi:10.1002/fuce.201200028

Publication type:	Article in scientific journal
Type of review:	Peer review (publication)
Title:	Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition
Authors:	Evans, Anna Prestat, Michel Tölke, R. Schlupp, M. V. F. Gauckler, L. J. Safa, Yasser Hocker, Thomas Courbat, J. Briand, D. de Rooij, N. F. Courty, D.
DOI:	10.1002/fuce.201200028
Published in:	Fuel Cells
Volume(Issue):	12
Issue:	4
Page(s):	614
Pages to:	623
Issue Date:	11-Jun-2012
Publisher / Ed. Institution:	Wiley
ISSN:	1615-6846 1615-6854
Language:	English
Subjects:	Pulsed Laser Deposition; Buckling; Micro-solid Oxide Fuel Cell; Free-standing Membrane
Subject (DDC):	530: Physics 621.3: Electrical, communications, control engineering
Abstract:	The residual stress and buckling patterns of free-standing 8 mol.% yttria-stabilized-zirconia (8YSZ) membranes prepared by pulsed laser deposition and microfabrication techniques on silicon substrates are investigated by wafer curvature, light microscopy, white light interferometry, and nanoindentation. The 300 nm thin 8YSZ membranes (390 × 390 Micron) deposited at 25°C are almost flat after free-etching, whereas deposition at 700°C yields strongly buckled membranes with a compressive stress of -1,100 ± 150 MPa and an out-of-plane-displacement of 6.5 lm. These latter membranes are mechanically stable during thermal cycling up to 500°C. Numerical simulations of the buckling shape using the Rayleigh-Ritz-method and a Young’s modulus of 200 GPa are in good agreement with the experimental data. The simulated buckling patterns are used to extract the local stress distribution within the freestanding membrane which consists of tensile and compressive stress regions that are below the failure stresses. This is important regarding the application in, e.g., microsolid oxide fuel cell membranes which must be thermomechanically stable during microfabrication and device operation.
URI:	https://digitalcollection.zhaw.ch/handle/11475/1637
Fulltext version:	Published version
License (according to publishing contract):	Licence according to publishing contract
Departement:	School of Engineering
Organisational Unit:	Institute of Computational Physics (ICP)
Appears in collections:	Publikationen School of Engineering

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Evans, A., Prestat, M., Tölke, R., Schlupp, M. V. F., Gauckler, L. J., Safa, Y., Hocker, T., Courbat, J., Briand, D., de Rooij, N. F., & Courty, D. (2012). Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition. Fuel Cells, 12(4), 614–623. https://doi.org/10.1002/fuce.201200028

Evans, A. et al. (2012) ‘Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition’, Fuel Cells, 12(4), pp. 614–623. Available at: https://doi.org/10.1002/fuce.201200028.

A. Evans et al., “Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition,” Fuel Cells, vol. 12, no. 4, pp. 614–623, Jun. 2012, doi: 10.1002/fuce.201200028.

EVANS, Anna, Michel PRESTAT, R. TÖLKE, M. V. F. SCHLUPP, L. J. GAUCKLER, Yasser SAFA, Thomas HOCKER, J. COURBAT, D. BRIAND, N. F. DE ROOIJ und D. COURTY, 2012. Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition. Fuel Cells. 11 Juni 2012. Bd. 12, Nr. 4, S. 614–623. DOI 10.1002/fuce.201200028

Evans, Anna, Michel Prestat, R. Tölke, M. V. F. Schlupp, L. J. Gauckler, Yasser Safa, Thomas Hocker, et al. 2012. “Residual Stress and Buckling Patterns of Free-Standing Yttria-Stabilized-Zirconia Membranes Fabricated by Pulsed Laser Deposition.” Fuel Cells 12 (4): 614–23. https://doi.org/10.1002/fuce.201200028.

Evans, Anna, et al. “Residual Stress and Buckling Patterns of Free-Standing Yttria-Stabilized-Zirconia Membranes Fabricated by Pulsed Laser Deposition.” Fuel Cells, vol. 12, no. 4, June 2012, pp. 614–23, https://doi.org/10.1002/fuce.201200028.