Publication type: Article in scientific journal
Type of review: Peer review (publication)
Title: Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces
Authors: Krishnamoorthy, Sivashankar
Van den Boogaart, Marc Antonius Friedrich
Brugger, Juergen
Hibert, Cyrille
Pugin, Raphael
Hinderling, Christian
Heinzelmann, Harry
DOI: 10.1002/adma.200702478
Published in: Advanced Materials
Volume(Issue): 20
Issue: 18
Pages: 3533
Pages to: 3538
Issue Date: 2008
Publisher / Ed. Institution: Wiley
ISSN: 0935-9648
Language: English
Subject (DDC): 620.11: Engineering materials
Abstract: A novel and flexible top‐down/bottom‐up scheme to achieve (sub‐)micrometer scale patterning of nanostructures with complementary micro‐/nanoarchitectures is presented. Nanostencils (perforated free‐standing Si3N4 membranes) are employed to pattern silicon nanopillars derived from the use of self‐assembled copolymer micelles as dry etch masks.
Fulltext version: Published version
License (according to publishing contract): Licence according to publishing contract
Departement: Life Sciences and Facility Management
Organisational Unit: Institute of Chemistry and Biotechnology (ICBT)
Appears in collections:Publikationen Life Sciences und Facility Management

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