| Publikationstyp: | Beitrag in wissenschaftlicher Zeitschrift |
| Art der Begutachtung: | Peer review (Publikation) |
| Titel: | Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces |
| Autor/-in: | Krishnamoorthy, Sivashankar Van den Boogaart, Marc Antonius Friedrich Brugger, Juergen Hibert, Cyrille Pugin, Raphael Hinderling, Christian Heinzelmann, Harry |
| DOI: | 10.1002/adma.200702478 |
| Erschienen in: | Advanced Materials |
| Band(Heft): | 20 |
| Heft: | 18 |
| Seite(n): | 3533 |
| Seiten bis: | 3538 |
| Erscheinungsdatum: | 2008 |
| Verlag / Hrsg. Institution: | Wiley |
| ISSN: | 0935-9648 1521-4095 |
| Sprache: | Englisch |
| Fachgebiet (DDC): | 620.11: Werkstoffe |
| Zusammenfassung: | A novel and flexible top‐down/bottom‐up scheme to achieve (sub‐)micrometer scale patterning of nanostructures with complementary micro‐/nanoarchitectures is presented. Nanostencils (perforated free‐standing Si3N4 membranes) are employed to pattern silicon nanopillars derived from the use of self‐assembled copolymer micelles as dry etch masks. |
| URI: | https://digitalcollection.zhaw.ch/handle/11475/13664 |
| Volltext Version: | Publizierte Version |
| Lizenz (gemäss Verlagsvertrag): | Lizenz gemäss Verlagsvertrag |
| Departement: | Life Sciences und Facility Management |
| Organisationseinheit: | Institut für Chemie und Biotechnologie (ICBT) |
| Enthalten in den Sammlungen: | Publikationen Life Sciences und Facility Management |
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Krishnamoorthy, S., Van den Boogaart, M. A. F., Brugger, J., Hibert, C., Pugin, R., Hinderling, C., & Heinzelmann, H. (2008). Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials, 20(18), 3533–3538. https://doi.org/10.1002/adma.200702478
Krishnamoorthy, S. et al. (2008) ‘Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces’, Advanced Materials, 20(18), pp. 3533–3538. Available at: https://doi.org/10.1002/adma.200702478.
S. Krishnamoorthy et al., “Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces,” Advanced Materials, vol. 20, no. 18, pp. 3533–3538, 2008, doi: 10.1002/adma.200702478.
KRISHNAMOORTHY, Sivashankar, Marc Antonius Friedrich VAN DEN BOOGAART, Juergen BRUGGER, Cyrille HIBERT, Raphael PUGIN, Christian HINDERLING und Harry HEINZELMANN, 2008. Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials. 2008. Bd. 20, Nr. 18, S. 3533–3538. DOI 10.1002/adma.200702478
Krishnamoorthy, Sivashankar, Marc Antonius Friedrich Van den Boogaart, Juergen Brugger, Cyrille Hibert, Raphael Pugin, Christian Hinderling, and Harry Heinzelmann. 2008. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials 20 (18): 3533–38. https://doi.org/10.1002/adma.200702478.
Krishnamoorthy, Sivashankar, et al. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials, vol. 20, no. 18, 2008, pp. 3533–38, https://doi.org/10.1002/adma.200702478.
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